Concepedia
Statistics
Publications
7
Citations
162
H-Index
Active since
2005
Affiliations
Chung-Ang University(Current)
Ivanovo State University of Chemistry and Technology
University of Chemistry and Technology, Prague
Gwan-Ha Kim is an author at Chung-Ang University specializing in engineering, applied physics, and magnetohydrodynamics.
Top concepts
EngineeringApplied PhysicsMagnetohydrodynamicsPhysicsSurface ScienceMaterial ScienceChemical EngineeringMaterials EngineeringThin FilmsPlasma Theory
Publications per year
2005–2009
On the applicability of self-consistent global model for the characterization of Cl2/Ar inductively coupled plasma
Alexander Efremov, Gwan-Ha Kim, Jong‐Gyu Kim et al. · Microelectronic Engineering · 2006 · 53 citations
Engineering, Self-consistent Global Model, Physics +5
Effect of gas mixing ratio on MgO etch behaviour in inductively coupled BCl3/Ar plasma
Gwan-Ha Kim, Chang-Il Kim, Alexander Efremov · Vacuum · 2005 · 33 citations
Bcl3/ar Plasma, Magnetohydrodynamics, Gas Discharge Plasma +2
Inductively coupled Cl2/N2 plasma: Experimental investigation and modeling
Gwan-Ha Kim, Alexander Efremov, Dong‐Pyo Kim et al. · Microelectronic Engineering · 2005 · 20 citations
Engineering, Applied Physics, Transport Phenomena +3
Applicability of self-consistent global model for characterization of inductively coupled Cl2 plasma
Alexander Efremov, Gwan-Ha Kim, Jong‐Gyu Kim et al. · Vacuum · 2006 · 17 citations
Self-consistent global model for inductively coupled Cl2 plasma: Comparison with experimental data and application for the etch process analysis
Alexander Efremov, Gwan-Ha Kim, Jong‐Gyu Kim et al. · Thin Solid Films · 2007 · 16 citations
Engineering, Physics, Self-consistent Global Model +7
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