On the applicability of self-consistent global model for the characterization of Cl2/Ar inductively coupled plasma - Concepedia

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On the applicability of self-consistent global model for the characterization of Cl2/Ar inductively coupled plasma

53

Citations

34

References

2006

Year

Alexander Efremov, Gwan-Ha Kim, Jong‐Gyu Kim, Chang-Il Kim

Microelectronic Engineering

EngineeringSelf-consistent Global ModelPhysicsPlasma TheoryApplied PhysicsApplied Plasma PhysicMagnetohydrodynamicsPlasma Application

References

	Year	Citations

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