Concepedia

Author

Dan Yaffe

KLA (Israel)

Also Known As

D. Yaffe, Dan Yaffe

2

Publications

38

Citations

2

H-Index

11

Concepts

All Affiliations

KLA (Israel)
DY

About

Dan Yaffe is an author at KLA (Israel) specializing in quality metrics, industrial inspection, and geometric modeling.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

1

1

32

2

Natural Sciences

1

1

32

3

Geometric Modeling

1

1

32

4

Measurement

1

1

32

5

Calibration

1

1

32

Dan Yaffe

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1

Publications

32

Citations

1

H-Index

YearCitations

Optimized Overlay Metrology Marks: Theory and Experiment

Michael E. Adel, Mark Ghinovker, Boris Golovanevsky,

IEEE Transactions on Semiconductor Manufacturing

2004

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