Concepedia

Yu-Hen Wu

YW

2

Publications

24

Citations

2

H-Index

2001

Active since

Affiliations

National Institutes of Applied Research(Current)

National Yang Ming Chiao Tung University

Yu-Hen Wu is an author at National Institutes of Applied Research specializing in chemical engineering, applied physics, and engineering.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceChemical EngineeringMaterials EngineeringChemistryThin FilmsNanoelectronicsMicroelectronics

Publications per year

2001–2002

2

Publications

2

Characteristics of fluorinated amorphous carbon films and implementation of 0.15 μm Cu/a-C:F damascene interconnection

Jia‐Min Shieh, Shich-Chang Suen, Kou-Chiang Tsai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 13 citations

Engineering, Thin Film Process Technology, Chemistry +17

Reduction of etching plasma damage on low dielectric constant fluorinated amorphous carbon films by multiple H2 plasma treatment

Jia‐Min Shieh, Kou-Chiang Tsai, Bau‐Tong Dai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 11 citations

Materials Engineering, Materials Science, Chemical Engineering +15

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