G. Obermeier

Publications

Citations

H-Index

1997

Active since

Affiliations

Leibniz Institute for High Performance Microelectronics(Current)

G. Obermeier is an author at Leibniz Institute for High Performance Microelectronics specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsMicrostructureElectrical EngineeringCorrosionThermodynamicsInstrumentationDefect ToleranceMaterial ScienceMicrofabrication

Publications per year

1997–2001

Publications

Upper yield point of large diameter silicon

A. Fischer, H. Richter, A. I. Shalynin et al. · Microelectronic Engineering · 2001 · 16 citations

Engineering, Microfabrication, Upper Yield Point +4

Iron detection in polished and epitaxial silicon wafers using generation lifetime measurements

G. Obermeier, D. Huber · Journal of Applied Physics · 1997 · 15 citations

Engineering, Generation Lifetime Measurements, Integrated Circuits +17

Denuded zone formation by conventional and rapid thermal anneals

G. Kissinger, Jan Vanhellemont, G. Obermeier et al. · Materials Science and Engineering B · 2000 · 13 citations

Denuded Zone, Engineering, Applied Physics +5

Dependence of gate oxide integrity on grown-in defect density in Czochralski grown silicon

U. Lambert, A. Huber, J. Grabmeier et al. · Microelectronic Engineering · 1999 · 10 citations

Electrical Engineering, Engineering, Bias Temperature Instability +8

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