Concepedia

Th. Arnold

TA

Statistics

Publications

4

Citations

167

H-Index

4

Active since

2001

Affiliations

Leibniz Institute of Surface Engineering(Current)

Th. Arnold is an author at Leibniz Institute of Surface Engineering specializing in etching processes, engineering, and surface science.

Publications per year

2001–2017

4

Publications

4

Etching of silicon surfaces using atmospheric plasma jets

H. Paetzelt, G. Böhm, Th. Arnold · Plasma Sources Science and Technology · 2015 · 72 citations · Full text

Engineering, Manufacturing Engineering, Materials Engineering +17

Human health risk evaluation of a microwave-driven atmospheric plasma jet as medical device

Antje Lehmann, F. Pietag, Th. Arnold · Clinical Plasma Medicine · 2017 · 35 citations · Full text

Natural Sciences, Oral Medicine, Physics +17

Ultra‐Precision Surface Machining with Reactive Plasma Jets

Th. Arnold, G. Böhm, H. Paetzelt · Contributions to Plasma Physics · 2014 · 34 citations

Engineering, Manufacturing Engineering, Materials Engineering +17

Ultrahigh-rate plasma jet chemical etching of silicon

Th. Arnold, Gerhard Boehm, A. Schindler · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 26 citations

Engineering, Materials Engineering, Materials Science +16

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