Concepedia

Thomas Theeuwes

TT

Statistics

Publications

3

Citations

48

H-Index

3

Active since

2002

Affiliations

ASML (Netherlands)(Current)

Thomas Theeuwes is an author at ASML (Netherlands) specializing in optoelectronics, industrial metrology, and mask error correction.

Publications per year

2002–2015

3

Publications

3

CD uniformity improvement by active scanner corrections

Jan B. van Schoot, O.F.J. Noordman, Peter Vanoppen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 22 citations

, , +6

Lithographic scanner stability improvements through advanced metrology and control

Peter Vanoppen, Thomas Theeuwes, Henry Megens et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 15 citations

, , +15

Virtual overlay metrology for fault detection supported with integrated metrology and machine learning

Honggoo Lee, Emil Schmitt-Weaver, Minsuk Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 11 citations

, , +17

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