S. Guerri is an author at University of Bologna specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceThin FilmsSurface ScienceElectrical EngineeringMaterials EngineeringPhysicsPhotovoltaicsMicroelectronics
Publications per year
1977–2006
13
13
Ion-implanted, electron-beam annealed TiN films as diffusion barriers for Al on Si shallow junctions
A. Armigliato, M. Finetti, Javier Garrido et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 29 citations
Engineering, Thin Film Process Technology, Semiconductor Device +17
Rows per page
1–5 of 13