Concepedia
Statistics
Publications
12
Citations
189
H-Index
11
Active since
2011
Affiliations
University of Arizona(Current)
Arthritis and Rheumatism Associates
Arizona Geological Survey
Hitachi (Japan)
Siannie Theng is an author at University of Arizona specializing in materials engineering, engineering, and materials science.
Publications per year
2011–2018
Effect of CVD-Coated Diamond Discs on Pad Surface Micro-Texture and Polish Performance in Copper CMP
Calliandra Stuffle, Ruochen Han, Yasa Sampurno et al. · ECS Journal of Solid State Science and Technology · 2018 · 26 citations
Engineering, Materials Engineering, Materials Science +17
Method for Ultra Rapid Determination of the Lubrication Mechanism in Chemical Mechanical Planarization
Ruochen Han, Yasa Sampurno, Siannie Theng et al. · ECS Journal of Solid State Science and Technology · 2016 · 22 citations
Engineering, Materials Engineering, Materials Science +13
Effect of Pad Surface Micro-Texture on Removal Rate during Interlayer Dielectric Chemical Mechanical Planarization Process
Xiaoyan Liao, Yun Zhuang, L. Borucki et al. · Japanese Journal of Applied Physics · 2012 · 18 citations
Application of the Stribeck+ Curve in Silicon Dioxide Chemical Mechanical Planarization
Ruochen Han, Yasa Sampurno, Siannie Theng et al. · ECS Journal of Solid State Science and Technology · 2017 · 18 citations
Engineering, Materials Engineering, Materials Science +14
Effect of Pad Surface Micro-Texture on Coefficient of Friction and Removal Rate during Copper CMP Process
Xiaoyan Liao, Yong Zhuang, L. Borucki et al. · Electrochemical and Solid-State Letters · 2011 · 17 citations
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