Ruochen Han

Effect of Pad Surface Micro-Texture on Tribological, Thermal and Kinetic Characterizations during Copper Chemical Mechanical Planarization

Ruochen Han, Yan Mu, Yasa Sampurno et al. · ECS Journal of Solid State Science and Technology · 2017 · 24 citations

Tribological Coating, Pad Temperature, Engineering +19

Effect of CVD-Coated Diamond Discs on Pad Surface Micro-Texture and Polish Performance in Copper CMP

Calliandra Stuffle, Ruochen Han, Yasa Sampurno et al. · ECS Journal of Solid State Science and Technology · 2018 · 24 citations

Tribological Coating, Engineering, Mechanical Engineering +24

Method for Ultra Rapid Determination of the Lubrication Mechanism in Chemical Mechanical Planarization

Ruochen Han, Yasa Sampurno, Siannie Theng et al. · ECS Journal of Solid State Science and Technology · 2016 · 22 citations

Materials Science, Tribological Coating, Engineering +15

Application of the Stribeck+ Curve in Silicon Dioxide Chemical Mechanical Planarization

Ruochen Han, Yasa Sampurno, Siannie Theng et al. · ECS Journal of Solid State Science and Technology · 2017 · 18 citations

Engineering, Mechanical Engineering, Silicon On Insulator +21

Improvements in Stribeck Curves for Copper and Tungsten Chemical Mechanical Planarization on Soft Pads

Matthew Bahr, Yasa Sampurno, Ruochen Han et al. · ECS Journal of Solid State Science and Technology · 2017 · 16 citations

Tribological Coating, Engineering, Mechanical Engineering +20