Takamitsu Tochino

Computational study of the demolding process in nanoimprint lithography

Rina Takai, Masaaki Yasuda, Takamitsu Tochino et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2014 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +17

Impact of resist shrinkage on the template release process in nanoimprint lithography

Takamitsu Tochino, Takahiro Shiotsu, Kimiaki Uemura et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2014 · 14 citations

Engineering, Materials Engineering, Materials Science +17

First demonstration of mini-PON by using standard-based DBA-API and software components on commodity server apart from modular OLT

Takamitsu Tochino, Keita Nishimoto, T. Hatano et al. · 2019 · 14 citations

Computing, Computer Science, Computer Systems +5

Simulation of the template release process based on fracture mechanics in nanoimprint lithography

Takahiro Shiotsu, Kimiaki Uemura, Takamitsu Tochino et al. · Microelectronic Engineering · 2014 · 10 citations

Engineering, Materials Engineering, Materials Science +14

Computational study of the effect of side wall quality of the template on release force in nanoimprint lithography

Takamitsu Tochino, Kimiaki Uemura, Marcin Michałowski et al. · Japanese Journal of Applied Physics · 2015 · 10 citations

Engineering, Materials Engineering, Materials Science +11