Sébastien Bérard-Bergery

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Active since

2015

Affiliations

Laboratoire d'Électronique des Technologies de l'Information(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Sébastien Bérard-Bergery is an author at Laboratoire d'Électronique des Technologies de l'Information specializing in microfabrication, mask fabrication, and engineering.

Publications per year

2015–2021

Publications

Template affinity role in CH shrink by DSA planarization

Raluca Tiron, A. Gharbi, Patricia Pimenta‐Barros et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 18 citations

Engineering, Materials Engineering, Materials Science +15

Rigorous Model-Based Mask Data Preparation Algorithm Applied to Grayscale Lithography for the Patterning at the Micrometer Scale

Pierre Chevalier, Patrick Quéméré, Sébastien Bérard-Bergery et al. · Journal of Microelectromechanical Systems · 2021 · 14 citations · Full text

Engineering, Manufacturing Engineering, Materials Engineering +10

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