M. L. Green - Concepedia

Concepedia

Author

M. L. Green

Also Known As

M. L. Green

4

Publications

415

Citations

4

H-Index

17

Concepts

All Affiliations

ML

About

M. L. Green is an author at IMEC specializing in engineering, applied physics, and thin films.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	405
2	Applied Physics	3	3	405
3	Chemical Engineering	1	1	111
4	Chemistry	1	1	278
5	Electrical Engineering	1	1	111

M. L. Green

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4

Publications

415

Citations

4

H-Index

	Year	Citations
Nucleation and growth of atomic layer deposited HfO2 gate dielectric layers on chemical oxide (Si–O–H) and thermal oxide (SiO2 or Si–O–N) underlayers M. L. Green, M.-Y. Ho, B. Busch, Journal of Applied Physics Film NucleationEngineeringChemistrySilicon On InsulatorAtomic Layer	2002	278
Mathematical description of atomic layer deposition and its application to the nucleation and growth of HfO2 gate dielectric layers Md. Ashraful Alam, M. L. Green Journal of Applied Physics EngineeringAlternate Gate DielectricsMathematical DescriptionLinear GrowthChemical Deposition	2003	111
Nucleation of atomic-layer-deposited HfO2 films, and evolution of their microstructure, studied by grazing incidence small angle x-ray scattering using synchrotron radiation M. L. Green, Andrew P. Allen, X. Li, Applied Physics Letters Materials ScienceHfo2 FilmsX-ray SpectroscopyScattering FeaturesEngineering	2006	16
Preparation and characterization of soluble conjugates of defined molecular sizes prepared by linkage of pepsin and carboxypeptidase A to dextrans Brian Chaplin, M. L. Green Biotechnology and Bioengineering	1982	10

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