Concepedia

M. L. Green

ML

4

Publications

415

Citations

4

H-Index

1982

Active since

Affiliations

IMEC(Current)

M. L. Green is an author at IMEC specializing in engineering, applied physics, and thin films.

Top concepts

Publications per year

1982–2006

4

Publications

4

Nucleation and growth of atomic layer deposited HfO2 gate dielectric layers on chemical oxide (Si–O–H) and thermal oxide (SiO2 or Si–O–N) underlayers

M. L. Green, M.-Y. Ho, B. Busch et al. · Journal of Applied Physics · 2002 · 278 citations

, , +20

Mathematical description of atomic layer deposition and its application to the nucleation and growth of HfO2 gate dielectric layers

Md. Ashraful Alam, M. L. Green · Journal of Applied Physics · 2003 · 111 citations

, , +18

Nucleation of atomic-layer-deposited HfO2 films, and evolution of their microstructure, studied by grazing incidence small angle x-ray scattering using synchrotron radiation

M. L. Green, Andrew P. Allen, X. Li et al. · Applied Physics Letters · 2006 · 16 citations

, , +15

Preparation and characterization of soluble conjugates of defined molecular sizes prepared by linkage of pepsin and carboxypeptidase A to dextrans

Brian Chaplin, M. L. Green · Biotechnology and Bioengineering · 1982 · 10 citations

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