Concepedia

Q. Liu

QL

2

Publications

63

Citations

2

H-Index

1994

Active since

Affiliations

University of North Carolina at Chapel Hill(Current)

Q. Liu is an author at University of North Carolina at Chapel Hill specializing in applied physics, engineering, and materials engineering.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationMaterials EngineeringPhysicsMicroscopySoft Matter

Publications per year

1994–1995

2

Publications

2

Investigation of roughened silicon surfaces using fractal analysis. II. Chemical etching, rapid thermal chemical vapor deposition, and thermal oxidation

L. Spanos, Q. Liu, E. A. Irene et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 32 citations

Engineering, Microscopy, Mechanical Engineering +19

A morphology study of the thermal oxidation of rough silicon surfaces

Q. Liu, L. Spanos, Chunchang Zhao et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 31 citations · Full text

Engineering, Thermal Oxidation, Silicon On Insulator +18

Rows per page

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