M. Kammeyer

Plasma-density measurements by microwave interferometry and Langmuir probes in an rf discharge

G. Neumann, U. Bänziger, M. Kammeyer et al. · Review of Scientific Instruments · 1993 · 60 citations

Charge Carrier Densities, Electrical Engineering, Engineering +14

Langmuir probe measurements of axial variation of plasma parameters in 27.1 MHz rf oxygen planar discharges

H. Sabadil, S. Klagge, M. Kammeyer · Plasma Chemistry and Plasma Processing · 1988 · 57 citations

Plasma Parameters, Engineering, Glow Discharge +8

Plasma Diagnostics in rf Discharges Using Nonlinear and Resonance Effects

Michael Klick, Wolfgang Rehak, M. Kammeyer · Japanese Journal of Applied Physics · 1997 · 56 citations

Resonance Effects, Electrical Engineering, Engineering +14

Innovative plasma diagnostics and control of process in reactive low-temperature plasmas

Michael Klick, M. Kammeyer, W. Rehak et al. · Surface and Coatings Technology · 1998 · 30 citations

Engineering, Low-temperature Plasmas, Nonthermal Plasma +6