Concepedia

Michael Klick

MK

8

Publications

328

Citations

8

H-Index

1993

Active since

Affiliations

Technical University of Munich(Current)

Michael Klick is an author at Technical University of Munich specializing in engineering, electrical engineering, and physics.

Top concepts

EngineeringElectrical EngineeringPhysicsApplied PhysicsInstrumentationComputational ElectromagneticsSpectroscopyPlasma PhysicsPlasma ScienceMicroelectronics

Publications per year

1993–2016

8

Publications

8

Nonlinearity of the radio-frequency sheath

Michael Klick · Journal of Applied Physics · 1996 · 116 citations

Electrical Engineering, Radio-frequency Sheath, Engineering +15

Plasma Diagnostics in rf Discharges Using Nonlinear and Resonance Effects

Michael Klick, Wolfgang Rehak, M. Kammeyer · Japanese Journal of Applied Physics · 1997 · 56 citations

Resonance Effects, Electrical Engineering, Engineering +14

Skin effect in a small symmetrically driven capacitive discharge

Thomas Mussenbrock, Torben Hemke, Dennis Ziegler et al. · Plasma Sources Science and Technology · 2008 · 45 citations

Engineering, Radio Frequency, Glow Discharge +16

Plasma monitoring and PECVD process control in thin film silicon-based solar cell manufacturing

Onno Gabriel, Simon Kirner, Michael Klick et al. · EPJ Photovoltaics · 2014 · 35 citations · Full text

Engineering, Photovoltaic System, Plasma Processing +17

Innovative plasma diagnostics and control of process in reactive low-temperature plasmas

Michael Klick, M. Kammeyer, W. Rehak et al. · Surface and Coatings Technology · 1998 · 30 citations

Engineering, Low-temperature Plasmas, Nonthermal Plasma +6

Rows per page

1–5 of 8