Langmuir probe measurements of axial variation of plasma parameters in 27.1 MHz rf oxygen planar discharges - Concepedia

Concepedia

Publication | Closed Access

Langmuir probe measurements of axial variation of plasma parameters in 27.1 MHz rf oxygen planar discharges

57

Citations

32

References

1988

Year

H. Sabadil, S. Klagge, M. Kammeyer

Plasma Chemistry and Plasma Processing

Plasma ParametersEngineeringGlow DischargeSpectroscopyPlasma SciencePlasma PhysicsLangmuir Probe MeasurementsAxial VariationInstrumentationGas Discharge PlasmaPlasma Application

References

	Year	Citations

Page 1