Concepedia

S. Penka

SP

4

Publications

162

Citations

4

H-Index

2003

Active since

Affiliations

Infineon Technologies (Germany)(Current)

S. Penka is an author at Infineon Technologies (Germany) specializing in electrical engineering, microelectronics, and engineering.

Top concepts

EngineeringMicroelectronicsElectrical EngineeringApplied PhysicsMaterial ScienceElectronic PackagingElectrochemistryComputer ArchitectureElectrical InsulationMaterials Engineering

Publications per year

2003–2006

4

Publications

4

Microcontacts with sub-30μm pitch for 3D chip-on-chip integration

H. Huebner, S. Penka, B. Barchmann et al. · Microelectronic Engineering · 2006 · 82 citations

3D Ic Architecture, Electrical Engineering, Engineering +9

Electromigration failure mechanism studies on copper interconnects

A. Fischer, A. von Glasow, S. Penka et al. · 2003 · 34 citations

Engineering, Interconnect (Integrated Circuits), Local Microstructural Properties +18

The influence of the SiN cap process on the electromigration and stressvoiding performance of dual damascene Cu interconnects

A. von Glasow, A. Fischer, D. Bunel et al. · 2003 · 27 citations

Crystal Structure, Engineering, Chemical Deposition +22

Process optimization-the key to obtain highly reliable Cu interconnects

A. Fischer, A. von Glasow, S. Penka et al. · 2004 · 19 citations

Materials Science, Electrical Engineering, Electromigration Technique +13

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