Concepedia

Patricia M. Kaufman

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Publications

1

Citations

17

H-Index

1

Active since

1988

Affiliations

United States Department of Defense(Current)

Patricia M. Kaufman is an author at United States Department of Defense specializing in image formation, ophthalmology, and engineering.

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Publications per year

1988–1988

1

Publications

1

Mask bias in submicron optical lithography

Chris A. Mack, Patricia M. Kaufman · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 17 citations

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