Concepedia

W. Schwarzenbach

WS

28

Publications

899

Citations

18

H-Index

1995

Active since

Affiliations

Soitec (France)(Current)

Université Grenoble Alpes

Laboratoire d'Électronique des Technologies de l'Information

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

École Polytechnique Fédérale de Lausanne

W. Schwarzenbach is an author at Soitec (France) specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringMicroelectronicsElectronic PackagingIntegrated CircuitsMaterial SciencePhysicsVlsi DesignNanoelectronics

Publications per year

1995–2022

28

Publications

28

Low leakage and low variability Ultra-Thin Body and Buried Oxide (UT2B) SOI technology for 20nm low power CMOS and beyond

F. Andrieu, O. Weber, J. Mazurier et al. · 2010 · 103 citations

Engineering, Vlsi Design, Integrated Circuits +16

Particle agglomeration study in rf silane plasmas: <i>In</i> <i>situ</i> study by polarization-sensitive laser light scattering

C. Courteille, Ch. Hollenstein, J.-L. Dorier et al. · Journal of Applied Physics · 1996 · 96 citations · Full text

Anionic clusters in dusty hydrocarbon and silane plasmas

Ch. Hollenstein, W. Schwarzenbach, A.A. Howling et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 80 citations · Full text

Chemical Engineering, Engineering, Physics +13

Sheath impedance effects in very high frequency plasma experiments

W. Schwarzenbach, A.A. Howling, M. Fivaz et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 68 citations · Full text

Engineering, Plasma Science, Plasma Physics +18

Silicon oxide particle formation in RF plasmas investigated by infrared absorption spectroscopy and mass spectrometry

Ch. Hollenstein, A.A. Howling, C. Courteille et al. · Journal of Physics D Applied Physics · 1998 · 50 citations · Full text

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