Olli E. Setälä

Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching

Xiaolong Liu, Behrad Radfar, Kexun Chen et al. · IEEE Transactions on Semiconductor Manufacturing · 2022 · 37 citations · Full text

Engineering, Integrated Circuits, Silicon On Insulator +20

Boron-Implanted Black Silicon Photodiode with Close-to-Ideal Responsivity from 200 to 1000 nm

Olli E. Setälä, Kexun Chen, Toni P. Pasanen et al. · ACS Photonics · 2023 · 17 citations · Full text

Photonic Sensor, Engineering, Si Photodiodes +16

Harnessing Carrier Multiplication in Silicon Solar Cells Using UV Photons

Kexun Chen, Olli E. Setälä, Behrad Radfar et al. · IEEE Photonics Technology Letters · 2021 · 12 citations · Full text

Optical Materials, Engineering, Carrier Multiplication +20

CMOS Image Sensor for Broad Spectral Range with >90% Quantum Efficiency

Olli E. Setälä, Martin J. Prest, Konstantin D. Stefanov et al. · Small · 2023 · 12 citations · Full text