Author
Xiaolong Liu
Also Known As
Liu Xiaolong, Liu, Xiaolong, Xiao-Long Liu, Xiao-long Liu, Xiaolong Liu
94
Publications
899
Citations
16
H-Index
45
Concepts
All Affiliations
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 13 | 15 | 327 |
2 | Applied Physics | 11 | 11 | 219 |
3 | Electrical Engineering | 7 | 7 | 138 |
4 | Chemical Engineering | 3 | 3 | 69 |
5 | Chemistry | 2 | 2 | 47 |
Xiaolong Liu
×
22
Publications
697
Citations
16
H-Index
| Year | Citations | |
|---|---|---|
2020 | 123 | |
2016 | 108 | |
2016 | 53 | |
2017 | 52 | |
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching Xiaolong Liu, Behrad Radfar, Kexun Chen, IEEE Transactions on Semiconductor Manufacturing EngineeringIntegrated CircuitsSilicon On InsulatorPlasma ProcessingElectronic Devices | 2022 | 37 |
2018 | 36 | |
2019 | 31 | |
2019 | 30 | |
2021 | 26 | |
2020 | 22 |
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