Takeaki Ebihara

Fabrication of nanoscale gaps using a combination of self-assembled molecular and electron beam lithographic techniques

Ryota Negishi, T. Hasegawa, Kazuya Terabe et al. · Applied Physics Letters · 2006 · 65 citations · Full text

Engineering, Materials Engineering, Materials Science +16

Vortex Mask: Making 80nm contacts with a twist!

M. D. Levenson, Grace Dai, Takeaki Ebihara · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 22 citations

Engineering, Electrical Engineering, Physics +10

Generating sub-30-nm polysilicon gates using PECVD amorphous carbon as hardmask and anti-reflective coating

Wei Liu, David Mui, Thorston Lill et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 19 citations

Natural Sciences, Electrical Engineering, Materials Science +17

Vortex via process: analysis and mask fabrication for contact CDs <80 nm

M. D. Levenson, Sze M. Tan, Grace Dai et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 12 citations

Engineering, Electrical Engineering, Materials Science +9

Beyond k1=0.25 lithography: 70-nm L/S patterning using KrF scanners

Takeaki Ebihara, M. D. Levenson, Wei Liu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 12 citations

Engineering, Materials Engineering, Physics +9