Statistics
Publications
1
Citations
19
H-Index
1
Active since
2003
Affiliations
Canon (United States)(Current)
Thorston Lill is an author at Canon (United States) specializing in thin film etching, semiconductor devices, and thin-film patterning.
Publications per year
2003–2003
1
1
Wei Liu, David Mui, Thorston Lill et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 19 citations
Natural Sciences, Electrical Engineering, Materials Science +17
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