Wen‐Shiang Liao

Oxidation of silicon nitride prepared by plasma-enhanced chemical vapor deposition at low temperature

Wen‐Shiang Liao, Chi‐Huei Lin, Si‐Chen Lee · Applied Physics Letters · 1994 · 93 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effects of Fin Width on Device Performance and Reliability of Double-Gate n-Type FinFETs

Cheng-Li Lin, Wen-Kuan Yeh, Han‐Wen Liu et al. · IEEE Transactions on Electron Devices · 2013 · 47 citations

Engineering, Electrical Engineering, Electronic Materials +16

Water-induced room-temperature oxidation of Si–H and –Si–Si– bonds in silicon oxide

Wen‐Shiang Liao, Si‐Chen Lee · Journal of Applied Physics · 1996 · 44 citations

Natural Sciences, Chemistry, Materials Science +17

High-performance III-V MOSFET with nano-stacked high-k gate dielectric and 3D fin-shaped structure

Szu-Hung Chen, Wen‐Shiang Liao, Hsin-Chia Yang et al. · Nanoscale Research Letters · 2012 · 40 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Investigation of Reliability Characteristics in NMOS and PMOS FinFETs

Wen‐Shiang Liao, Yie-Gie Liaw, Mao-Chyuan Tang et al. · IEEE Electron Device Letters · 2008 · 37 citations

Engineering, Electrical Engineering, Materials Science +17