Chao‐Chang A. Chen

Publications

512

Citations

H-Index

1996

Active since

Affiliations

National Taiwan University of Science and Technology(Current)

Feng Chia University

Industrial Technology Research Institute

Tamkang University

Chao‐Chang A. Chen is an author at National Taiwan University of Science and Technology specializing in engineering, materials science, and mechanical engineering.

ORCID

Top concepts

EngineeringMaterial ScienceMechanical EngineeringMaterials EngineeringApplied PhysicsMicrofabricationMaterial Processing3D PrintingMicrostructureSurface Polishing

Publications per year

1996–2024

Publications

Study on high efficient sapphire wafer processing by coupling SG-mechanical polishing and GLA-CMP

Yongchao Xu, Jing Lu, Xipeng Xu et al. · International Journal of Machine Tools and Manufacture · 2018 · 91 citations

Materials Science, Materials Engineering, Sg-mechanical Polishing +9

Mechano-chemical polishing of silicon wafers

Chao‐Chang A. Chen, Li-Sheng Shu, Shah-Rong Lee · Journal of Materials Processing Technology · 2003 · 46 citations

Materials Science, Wafer Scale Processing, Engineering +7

Study on diamond wire wear, surface quality, and subsurface damage during multi-wire slicing of c-plane sapphire wafer

Ajay Gupta, Chao‐Chang A. Chen, Hsien-Wei Hsu · The International Journal of Advanced Manufacturing Technology · 2018 · 45 citations

Materials Science, Multi-wire Slicing, Subsurface Damage +8

A process model of wafer thinning by diamond grinding

Chao‐Chang A. Chen, Li-Sheng Hsu · Journal of Materials Processing Technology · 2007 · 38 citations

Process Model, Engineering, Material Processing +6

Material removal mechanism of Cu-CMP studied by nano-scratching under various environmental conditions

Wei-En Fu, Chao‐Chang A. Chen, Kuo‐Wei Huang et al. · Wear · 2012 · 29 citations

Materials Science, Materials Engineering, Chemical Engineering +9

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