Concepedia

Li-Sheng Shu

LS

1

Publications

46

Citations

1

H-Index

2003

Active since

Affiliations

National Taiwan University of Science and Technology(Current)

Li-Sheng Shu is an author at National Taiwan University of Science and Technology specializing in material processing, engineering, and mechanical engineering.

Top concepts

EngineeringSurface ScienceMaterial ScienceMicrofabricationSurface PolishingMaterial ProcessingMechanical Engineering

Publications per year

2003–2003

1

Publications

1

Mechano-chemical polishing of silicon wafers

Chao‐Chang A. Chen, Li-Sheng Shu, Shah-Rong Lee · Journal of Materials Processing Technology · 2003 · 46 citations

Materials Science, Wafer Scale Processing, Engineering +7

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