Concepedia
Statistics
Publications
2
Citations
33
H-Index
Active since
2004
Affiliations
Carl Zeiss (Germany)(Current)
Markus Rupp is an author at Carl Zeiss (Germany) specializing in metrology, physics, and optics.
Publications per year
2004–2004
Fabrication and metrology of diffraction limited soft x-ray optics for the EUV microlithography
Udo Dinger, Guenther Seitz, S. Schulte et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 22 citations
Engineering, Manufacturing Engineering, Physics +15
EUV microlithography: a challenge for optical metrology
Günther Seitz, Stefan Schulte, Udo Dinger et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 11 citations
Engineering, Physics, Metrology +9
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