Concepedia

Günther Seitz

GS

2

Publications

41

Citations

2

H-Index

2001

Active since

Affiliations

Carl Zeiss (Germany)(Current)

Günther Seitz is an author at Carl Zeiss (Germany) specializing in instrumentation, interferometry, and optical properties.

Top concepts

EngineeringInterferometryApplied PhysicsInstrumentationOptical PropertiesPhysicsMicroscopyOptical MaterialsRadiation ImagingPhotonic Metrology

Publications per year

2001–2004

2

Publications

2

Interferometric testing of optical surfaces at its current limit

Bernd Dörband, Günther Seitz · Optik · 2001 · 30 citations

Optical Materials, Engineering, Interferometric Testing +7

EUV microlithography: a challenge for optical metrology

Günther Seitz, Stefan Schulte, Udo Dinger et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 11 citations

Figure Metrology, Euv Demand, Euv Microlithography +14

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