Concepedia

Yeongbong Park

YP

4

Publications

73

Citations

4

H-Index

2012

Active since

Affiliations

Pusan National University(Current)

Yeongbong Park is an author at Pusan National University specializing in engineering, microfabrication, and materials science.

Top concepts

Publications per year

2012–2014

4

Publications

4

Planarization of wafer edge profile in chemical mechanical polishing

Yeongbong Park, Hobin Jeong, Sungha Choi et al. · International Journal of Precision Engineering and Manufacturing · 2012 · 23 citations

, , +7

Effect of wafer size on material removal rate and its distribution in chemical mechanical polishing of silicon dioxide film

Hyunseop Lee, Yeongbong Park, Sangjik Lee et al. · Journal of Mechanical Science and Technology · 2013 · 20 citations

, , +12

Effect of contact angle between retaining ring and polishing pad on material removal uniformity in CMP process

Yeongbong Park, Hyunseop Lee, Youngkyun Lee et al. · International Journal of Precision Engineering and Manufacturing · 2013 · 16 citations

, , +10

Preliminary study on the effect of spray slurry nozzle in CMP for environmental sustainability

Hyunseop Lee, Yeongbong Park, Sangjik Lee et al. · International Journal of Precision Engineering and Manufacturing · 2014 · 14 citations

, , +3

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