Concepedia

Jun Ki Jang

JK

Statistics

Publications

1

Citations

18

H-Index

1

Active since

2020

Affiliations

Sungkyunkwan University(Current)

Jun Ki Jang is an author at Sungkyunkwan University specializing in natural sciences, plasma-surface interactions, and electrical engineering.

Publications per year

2020–2020

1

Publications

1

Plasma Induced Damage Reduction of Ultra Low-k Dielectric by Using Source Pulsed Plasma Etching for Next BEOL Interconnect Manufacturing

Jun Ki Jang, Hyun Woo Tak, Ye Ji Shin et al. · IEEE Transactions on Semiconductor Manufacturing · 2020 · 18 citations

Natural Sciences, Electrical Engineering, Materials Science +17

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