A.M. McCarthy

Ultra-Low Resistance, Through-Wafer Via (TWV) Technology and Its Applications in Three Dimensional Structures on Silicon

H. Tom Soh, C. Patrick Yue, A.M. McCarthy et al. · Japanese Journal of Applied Physics · 1999 · 46 citations

Engineering, Integrated Circuits, Three Dimensional Structures +16

An excimer-laser-based nanosecond thermal diffusion technique for ultra-shallow pn junction fabrication

K.H. Weiner, P.G. Carey, A.M. McCarthy et al. · Microelectronic Engineering · 1993 · 24 citations

Materials Science, Advanced Laser Processing, Engineering +10

Vapor-liquid equilibrium in capillary distillation

George Yeh, Bao-Tzang Yeh, Szilvia Schmidt et al. · Desalination · 1991 · 24 citations

Engineering, Capillarity Phenomenon, Thermodynamics +3

Characterization of reverse leakage components for ultrashallow p+/n diodes fabricated using gas immersion laser doping

K.-Josef Kramer, S. Talwar, A.M. McCarthy et al. · IEEE Electron Device Letters · 1996 · 20 citations

Gas Immersion Laser, Engineering, Laser Applications +19

Low-temperature fabrication of p/sup +/-n diodes with 300-AA junction depth

K.H. Weiner, P.G. Carey, A.M. McCarthy et al. · IEEE Electron Device Letters · 1992 · 19 citations

Optical Materials, P/sup +/-N Diodes, Engineering +22