Xiaoqin Sun

Effect of arginine-based cleaning solution on BTA residue removal after Cu-CMP

Qi Wang, Da Yin, Baohong Gao et al. · Colloids and Surfaces A Physicochemical and Engineering Aspects · 2019 · 56 citations

Chemical Engineering, Engineering, Environmental Engineering +7

Theoretical and electrochemical analysis on inhibition effect of benzotriazole and 1,2,4-triazole on cobalt surface

Da Yin, Yang Liu, Xinhuan Niu et al. · Colloids and Surfaces A Physicochemical and Engineering Aspects · 2020 · 50 citations

Inorganic Chemistry, Chemical Engineering, Cobalt Surface +8

Synergistic effect of composite complex agent on BTA removal in post CMP cleaning of copper interconnection

Da Yin, Yang Liu, Tengda Ma et al. · Materials Chemistry and Physics · 2020 · 46 citations

Materials Science, Copper Interconnection, Chemical Engineering +8

Experimental validation and molecular dynamics simulation of removal of PO residue on Co surface by alkaline cleaning solution with different functional groups

Xiaoqin Sun, Shihao Zhang, Mengrui Liu et al. · Colloids and Surfaces A Physicochemical and Engineering Aspects · 2020 · 41 citations

Environmental Electrochemistry, Po Residue, Chemical Engineering +15

Effect of EDTA-based alkaline cleaning solution on TAZ removal in post CMP cleaning of copper interconnection

Da Yin, Qi Wang, Shihao Zhang et al. · Materials Research Bulletin · 2021 · 28 citations

Copper Interconnection, Chemical Engineering, Engineering +4