Concepedia
Statistics
Publications
3
Citations
52
H-Index
Active since
2015
Affiliations
ASML (Netherlands)(Current)
SK Group (South Korea)
Nang-Lyeom Oh is an author at ASML (Netherlands) specializing in overlay metrology, metrology, and surface metrology.
Publications per year
2015–2019
A study of swing-curve physics in diffraction-based overlay
Kaustuve Bhattacharyya, Arie den Boef, Greet Storms et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 23 citations
Natural Sciences, Materials Engineering, Materials Science +16
Improving full-wafer on-product overlay using computationally designed process-robust and device-like metrology targets
Youngsik Kim, Young-Sun Hwang, Mi-Rim Jung et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 18 citations
Engineering, Manufacturing Engineering, Design Automation +14
Measuring after etch overlay and characterizing tilt fingerprints in multi-tier 3D-NAND structures
Honggoo Lee, Dong-Young Lee, Jun-Yeob Kim et al. · 2019 · 11 citations
Engineering, Computer Engineering, Memory +16
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