Joseph P. Klesko

Low Temperature Thermal Atomic Layer Deposition of Cobalt Metal Films

Joseph P. Klesko, Marissa M. Kerrigan, Charles H. Winter · Chemistry of Materials · 2016 · 75 citations

Materials Science, Engineering, Nanomaterials +13

Low Temperature, Selective Atomic Layer Deposition of Cobalt Metal Films Using Bis(1,4-di-<i>tert</i>-butyl-1,3-diazadienyl)cobalt and Alkylamine Precursors

Marissa M. Kerrigan, Joseph P. Klesko, Charles H. Winter · Chemistry of Materials · 2017 · 47 citations

Materials Science, Engineering, Nanotechnology +13

Substrate selectivity in the low temperature atomic layer deposition of cobalt metal films from bis(1,4-di-<i>tert</i>-butyl-1,3-diazadienyl)cobalt and formic acid

Marissa M. Kerrigan, Joseph P. Klesko, Sara M. Rupich et al. · The Journal of Chemical Physics · 2016 · 40 citations

Low Temperature, Selective Atomic Layer Deposition of Nickel Metal Thin Films

Marissa M. Kerrigan, Joseph P. Klesko, Kyle J. Blakeney et al. · ACS Applied Materials & Interfaces · 2018 · 38 citations

Engineering, Metallic Nanomaterials, Chemistry +16

Thermal Atomic Layer Deposition of Titanium Films Using Titanium Tetrachloride and 2-Methyl-1,4-bis(trimethylsilyl)-2,5-cyclohexadiene or 1,4-Bis(trimethylsilyl)-1,4-dihydropyrazine

Joseph P. Klesko, C. M. Thrush, Charles H. Winter · Chemistry of Materials · 2015 · 31 citations

Materials Science, Chemical Engineering, Engineering +13