Marissa M. Kerrigan

Low Temperature Thermal Atomic Layer Deposition of Cobalt Metal Films

Joseph P. Klesko, Marissa M. Kerrigan, Charles H. Winter · Chemistry of Materials · 2016 · 75 citations

Natural Sciences, Chemistry, Materials Science +14

Photoactive Zinc Ferrites Fabricated via Conventional CVD Approach

Daniel Peeters, Dereje H. Taffa, Marissa M. Kerrigan et al. · ACS Sustainable Chemistry & Engineering · 2017 · 57 citations

Natural Sciences, Materials Engineering, Materials Science +17

Low Temperature, Selective Atomic Layer Deposition of Cobalt Metal Films Using Bis(1,4-di-<i>tert</i>-butyl-1,3-diazadienyl)cobalt and Alkylamine Precursors

Marissa M. Kerrigan, Joseph P. Klesko, Charles H. Winter · Chemistry of Materials · 2017 · 47 citations

Natural Sciences, Materials Engineering, Materials Science +17

Substrate selectivity in the low temperature atomic layer deposition of cobalt metal films from bis(1,4-di-<i>tert</i>-butyl-1,3-diazadienyl)cobalt and formic acid

Marissa M. Kerrigan, Joseph P. Klesko, Sara M. Rupich et al. · The Journal of Chemical Physics · 2016 · 40 citations

Natural Sciences, Materials Engineering, Materials Science +17

Low Temperature, Selective Atomic Layer Deposition of Nickel Metal Thin Films

Marissa M. Kerrigan, Joseph P. Klesko, Kyle J. Blakeney et al. · ACS Applied Materials & Interfaces · 2018 · 39 citations

Natural Sciences, Materials Engineering, Materials Science +17