Concepedia

P. Hrkút

PH

Statistics

Publications

4

Citations

56

H-Index

4

Active since

1999

Affiliations

Slovak Academy of Sciences(Current)

Institute of Informatics of the Slovak Academy of Sciences

P. Hrkút is an author at Slovak Academy of Sciences specializing in electrical engineering, applied physics, and engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringPhysicsOptoelectronicsMaterial ScienceMicroelectronicsPhotonicsCosmic RayInstrumentation

Publications per year

1999–2016

4

Publications

4

Characterization of epitaxial 4H-SiC for photon detectors

F. Dubecký, E. Gombia, C. Ferrari et al. · Journal of Instrumentation · 2012 · 20 citations

Semiconductor Technology, Photonics, Electrical Engineering +15

Study of the new CSAR62 positive tone electron-beam resist at 40 keV electron energy

Robert Andok, A Bencurova, Katia Vutova et al. · Journal of Physics Conference Series · 2016 · 13 citations · Full text

Engineering, Electron-beam Lithography, Electron Optic +16

Directly sputtered stress-compensated carbon protective layer for silicon stencil masks

P. Hudek, P. Hrkút, Milan Držík et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 12 citations

Materials Engineering, Materials Science, Electrical Engineering +13

Advanced patterning techniques for nanodevice fabrication

I. Kostič, Robert Andok, Vojtěch Barák et al. · Journal of Materials Science Materials in Electronics · 2003 · 11 citations

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