Kai Dirscherl

Accounting for PDMS shrinkage when replicating structures

Morten Hannibal Madsen, Nikolaj Agentoft Feidenhans’l, Poul‐Erik Hansen et al. · Journal of Micromechanics and Microengineering · 2014 · 92 citations

Engineering, Molding (Process), Shrinkage Factor +18

The European nanometrology landscape

Richard Leach, Robert Boyd, T. M. Burke et al. · Nanotechnology · 2011 · 83 citations

Materials Science, Nanosensors, Nanoscale System +13

CD characterization of nanostructures in SEM metrology

C. G. Frase, Egbert Buhr, Kai Dirscherl · Measurement Science and Technology · 2007 · 72 citations

Engineering, Microscopy, Cd Characterization +17

Calibration of step heights and roughness measurements with atomic force microscopes

Niels Kofod, A. Kühle, Christian F. Nielsen et al. · Precision Engineering · 2002 · 58 citations

Atomic Force Microscopes, Precision Measurement, Engineering +14

Two-dimensional nanometer-scale calibration based on one-dimensional gratings

Line Hagner Nielsen, Kai Dirscherl, Jan Friis Jørgensen et al. · Applied Physics A · 1998 · 39 citations

Sensor Calibration, Engineering, Microscopy +6