Concepedia

M. Mohri

MM

7

Publications

284

Citations

7

H-Index

1990

Active since

Affiliations

Oki Electric Industry (Japan)(Current)

M. Mohri is an author at Oki Electric Industry (Japan) specializing in applied physics, engineering, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceChemistryThin FilmsChemical EngineeringNanomanufacturingPhysical ChemistrySolar Cell Materials

Publications per year

1990–1997

7

Publications

7

Structural properties of polycrystalline silicon films prepared at low temperature by plasma chemical vapor deposition

Hiroaki Kakinuma, M. Mohri, Masaaki Sakamoto et al. · Journal of Applied Physics · 1991 · 118 citations

Engineering, Polycrystalline Silicon Films, Thin Film Process Technology +19

Plasma Etching of ITO Thin Films Using a CH<sub>4</sub>/H<sub>2</sub> Gas Mixture

M. Mohri, Hiroaki Kakinuma, Masaaki Sakamoto et al. · Japanese Journal of Applied Physics · 1990 · 49 citations

Materials Science, Engineering, Surface Science +10

Mechanism of low-temperature polycrystalline silicon growth from a SiF4/SiH4/H2 plasma

Hiroaki Kakinuma, M. Mohri, T. Tsuruoka · Journal of Applied Physics · 1995 · 32 citations

Materials Science, Materials Engineering, Chemical Engineering +14

Characterization of Oxygen and Carbon in Undoped AlGaAs Grown by Organometallic Vapor-Phase Epitaxy

Hiroaki Kakinuma, M. Mohri, Masahiro Akiyama · Japanese Journal of Applied Physics · 1997 · 30 citations

Materials Science, C Impurities, Chemical Engineering +15

Very-Low-Temperature Preparation of Poly-Si Films by Plasma Chemical Vapor Deposition Using SiF<sub>4</sub>/SiH<sub>4</sub>/H<sub>2</sub> Gases

M. Mohri, Hiroaki Kakinuma, Masaaki Sakamoto et al. · Japanese Journal of Applied Physics · 1991 · 29 citations

Engineering, Thin Film Process Technology, Chemical Deposition +16

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