Concepedia

Y. Chen

YC

Statistics

Publications

1

Citations

17

H-Index

1

Active since

2000

Affiliations

University of Glasgow(Current)

Y. Chen is an author at University of Glasgow specializing in electronic devices, electrical engineering, and electronic packaging.

Top concepts

EngineeringVlsi DesignApplied PhysicsNanoelectronicsMaterial ScienceMicroelectronicsElectronic DevicesIntegrated CircuitsElectronic MaterialsElectronic Packaging

Publications per year

2000–2000

1

Publications

1

Fabrication of 30 nm T gates using SiNx as a supporting and definition layer

Y. Chen, D.L. Edgar, X. Li et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 17 citations

Engineering, Vlsi Design, Electron-beam Lithography +18

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