Rohit Khare

Recombination of chlorine atoms on plasma-conditioned stainless steel surfaces in the presence of adsorbed Cl₂

Luc Stafford, Rohit Khare, Joydeep Guha et al. · Journal of Physics D Applied Physics · 2009 · 35 citations

Engineering, Chemistry, Plasma Processing +16

CH4/H2/Ar/Cl2 electron cyclotron resonance plasma etching of via holes for InP-based microwave devices

Rohit Khare, J.J. Brown, Meng Hu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 24 citations

Materials Science, Electrical Engineering, Engineering +15

Effect of Cu contamination on recombination of O atoms on a plasma-oxidized silicon surface

Joydeep Guha, Rohit Khare, Luc Stafford et al. · Journal of Applied Physics · 2009 · 20 citations

Engineering, Auger Electron Spectrometer, Vacuum Device +19

Experimental and modeling study of O and Cl atoms surface recombination reactions in O2 and Cl2 plasmas

Luc Stafford, Joydeep Guha, Rohit Khare et al. · Pure and Applied Chemistry · 2010 · 17 citations · Full text

Engineering, Plasma Science, Plasma Physics +20

Electron energy distribution functions in low-pressure oxygen plasma columns sustained by propagating surface waves

Luc Stafford, Rohit Khare, Vincent M. Donnelly et al. · Applied Physics Letters · 2009 · 16 citations

Engineering, Surface Waves, Plasma Science +17