Statistics
Publications
3
Citations
79
H-Index
3
Active since
1998
Affiliations
Micro Focus (United States)(Current)
E. Klawuhn is an author at Micro Focus (United States) specializing in materials science, materials engineering, and metallic materials.
Publications per year
1998–2008
3
3
Ionized physical-vapor deposition using a hollow-cathode magnetron source for advanced metallization
E. Klawuhn, G. C. D’Couto, K. A. Ashtiani et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 49 citations
Natural Sciences, Materials Engineering, Materials Science +17
Ti-based Barrier for Cu Interconnect Applications
Wen‐Wei Wu, H.-J. Wu, G. Dixit et al. · 2008 · 11 citations
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