Keith C. Thompson

Ion debris characterization from a z-pinch extreme ultraviolet light source

Erik Antonsen, Keith C. Thompson, Matthew R. Hendricks et al. · Journal of Applied Physics · 2006 · 26 citations

Engineering, Optical Diagnostics, Spectroscopy +13

Lifetime measurements on collector optics from Xe and Sn extreme ultraviolet sources

Shailendra N. Srivastava, Keith C. Thompson, Erik Antonsen et al. · Journal of Applied Physics · 2007 · 21 citations

Short Wavelength Optic, Engineering, Physics +15

Experimental test chamber design for optics exposure testing and debris characterization of a xenon discharge produced plasma source for extreme ultraviolet lithography

Keith C. Thompson, Erik Antonsen, Matthew R. Hendricks et al. · Microelectronic Engineering · 2005 · 21 citations

Extreme Ultraviolet Lithography, Debris Characterization, Glow Discharge +6

Reduction of Ion Energies From a Multicomponent $Z$ -Pinch Plasma

D. N. Ruzic, Keith C. Thompson, Brian Jurczyk et al. · IEEE Transactions on Plasma Science · 2007 · 11 citations

Engineering, Physics, Pinch Instability +13

Determination of charge state, energy and angular distributions of tin ions emitted from laser produced plasma based EUV sources.

Oran Morris, P. Hayden, Padraig Dunne et al. · Journal of Physics Conference Series · 2007 · 10 citations · Full text