Oran Morris

Laser-produced plasma light source for extreme-ultraviolet lithography applications

Reza S. Abhari, Bob Rollinger, Andrea Z. Giovannini et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 39 citations

Ultraviolet Light, Short Wavelength Optic, Engineering +20

Angular emission and self-absorption studies of a tin laser produced plasma extreme ultraviolet source between 10 and 18nm

Oran Morris, Fergal O’Reilly, Padraig Dunne et al. · Applied Physics Letters · 2008 · 35 citations

Ultraviolet Light, Optical Materials, Engineering +20

Localisation of gamma-ray interaction points in thick monolithic CeBr3 and LaBr3:Ce scintillators

Alexei Ulyanov, Oran Morris, O. J. Roberts et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2016 · 34 citations · Full text

Performance of a monolithic LaBr3:Ce crystal coupled to an array of silicon photomultipliers

Alexei Ulyanov, Oran Morris, L. Hanlon et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2015 · 30 citations

Photonics, Electrical Engineering, Wafer Scale Processing +12

Angular and energy distribution of Sn ion debris ejected from a laser-produced plasma source, for laser power densities in the range suitable for extreme ultraviolet lithography

A. P. O’Connor, Oran Morris, Emma Sokell · Journal of Applied Physics · 2011 · 28 citations

Planar Sn Targets, Laser Power Densities, Engineering +19