Bodo Kalkofen

Fabrication and investigation of three-dimensional ferroelectric capacitors for the application of FeRAM

Chia-Pin Yeh, Marco Lisker, Bodo Kalkofen et al. · AIP Advances · 2016 · 27 citations · Full text

Materials Science, Electrical Engineering, Ferroelastics +14

Ag films grown by remote plasma enhanced atomic layer deposition on different substrates

Akinwumi A. Amusan, Bodo Kalkofen, Hassan Gargouri et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 22 citations

Engineering, Metallic Nanomaterials, Thin Film Process Technology +16

Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon

Bodo Kalkofen, Akinwumi A. Amusan, Muhammad S. K. Bukhari et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 21 citations · Full text

Engineering, Shallow Boron Doping, Vacuum Device +17

Investigation of strontium tantalate thin films for high-k gate dielectric applications

Mindaugas Šilinskas, Marco Lisker, Bodo Kalkofen et al. · Materials Science in Semiconductor Processing · 2006 · 14 citations

Materials Engineering, Materials Science, Engineering +6

Application of atomic layer deposited dopant sources for ultra‐shallow doping of silicon

Bodo Kalkofen, Akinwumi A. Amusan, Marco Lisker et al. · Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics · 2013 · 12 citations

Engineering, Antimony Oxide, Silicon On Insulator +18