Concepedia

Yukinobu Murao

YM

11

Publications

294

Citations

10

H-Index

1993

Active since

Affiliations

NEC (Japan)(Current)

Yukinobu Murao is an author at NEC (Japan) specializing in engineering, microelectronics, and applied physics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsSurface ScienceElectrical EngineeringThin FilmsMicrofabricationChemical EngineeringElectronic Materials

Publications per year

1993–1995

11

Publications

11

A Room Temperature Chemical Vapor Deposition SiOF Film Formation Technology for the Interlayer in Submicron Multilevel Interconnections

Tetsuya Homma, Ryuichi Yamaguchi, Yukinobu Murao · Journal of The Electrochemical Society · 1993 · 74 citations

Engineering, Multilevel Interconnection, Water Vapor +19

A Selective SiO2 Film‐Formation Technology Using Liquid‐Phase Deposition for Fully Planarized Multilevel Interconnections

Tetsuya Homma, Takuya Katoh, Yoshiaki Yamada et al. · Journal of The Electrochemical Society · 1993 · 57 citations

Engineering, Optoelectronic Devices, Thin Film Process Technology +19

An asymmetric sidewall process for high performance LDD MOSFET's

T. Horiuchi, T. Homma, Yukinobu Murao et al. · IEEE Transactions on Electron Devices · 1994 · 37 citations

Ldd Mosfet, Electrical Engineering, Physical Design (Electronics) +10

Flow Characteristics of SiOF Films in Room Temperature Chemical Vapor Deposition Utilizing Fluoro‐Trialkoxy‐Silane Group and Pure Water as Gas Sources

Tetsuya Homma, Yukinobu Murao, Ryuichi Yamaguchi · Journal of The Electrochemical Society · 1993 · 25 citations

Engineering, Surface Nanotechnology, Thin Film Process Technology +16

Properties of liquid-phase-deposited SiO2 films for interlayer dielectrics in ultralarge-scale integrated circuit multilevel interconnections

Tetsuya Homma, Yukinobu Murao · Thin Solid Films · 1994 · 19 citations

Materials Science, Electrical Engineering, Engineering +10

Rows per page

1–5 of 11