Statistics
Publications
1
Citations
59
H-Index
1
Active since
2020
Affiliations
ASML (Netherlands)(Current)
Joerg Zimmerman is an author at ASML (Netherlands) specializing in printing processes, lens systems, and machine vision.
Publications per year
2020–2020
1
1
High-NA EUV lithography exposure tool: program progress
Jan van Schoot, Eelco van Setten, Kars Troost et al. · 2020 · 59 citations
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