Statistics
Publications
1
Citations
28
H-Index
1
Active since
2002
Affiliations
Xudong Tang is an author at Massachusetts Institute of Technology specializing in computer engineering, optical systems, and photonic metrology.
Publications per year
2002–2002
1
1
Parallel maskless optical lithography for prototyping, low-volume production, and research
Rajesh Menon, Xudong Tang, Henry I. Smith et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 28 citations
Optical Materials, Engineering, Electron-beam Lithography +24
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