Statistics
Publications
8
Citations
268
H-Index
8
Active since
2006
Affiliations
University of Tübingen(Current)
A. Heeren is an author at University of Tübingen specializing in nanotechnology, materials science, and nanomaterials.
Publications per year
2006–2008
8
8
Influence of temperature on HSQ electron-beam lithography
Michael Haffner, A. Haug, A. Heeren et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 71 citations
Natural Sciences, Materials Engineering, Materials Science +13
Simple high resolution nanoimprint-lithography
Michael Haffner, A. Heeren, Monika Fleischer et al. · Microelectronic Engineering · 2007 · 29 citations
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