Concepedia

M.T. Dugger

MD

1

Publications

88

Citations

1

H-Index

1996

Active since

Affiliations

Sandia National Laboratories(Current)

M.T. Dugger is an author at Sandia National Laboratories specializing in optical properties, instrumentation, and applied physics.

Top concepts

EngineeringInterferometryApplied PhysicsInstrumentationOptoelectronicsOptical MaterialsOptical MetrologyOptical Properties

Publications per year

1996–1996

1

Publications

1

Optical interferometry for surface measurements of CMP pads

David J. Stein, Dale L. Hetherington, M.T. Dugger et al. · Journal of Electronic Materials · 1996 · 88 citations

Optical Materials, Engineering, Optical Properties +7

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